Patent Assignment
Reel/Frame 049697/0925
Assignment of Assignor's Interest
Recorded: 2019-07-09
Pages: 4
Assignors
HONDA, TAKUMI
Executed: 2019-06-17
SANO, KAZUSIGE
Executed: 2019-05-22
HYAKUTAKE, HIRONOBU
Executed: 2019-05-22
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Liquid Processing Apparatus, Liquid Processing Method, and Storage Medium