Patent Assignment
Reel/Frame 049712/0110
Assignment of Assignor's Interest
Recorded: 2019-07-10
Pages: 5
Assignor
NAKAMURA, AKIRA
Executed: 2019-05-30
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Polishing Apparatus and Polishing Method