Patent Assignment
Reel/Frame 049812/0880
Assignment of Assignor's Interest
Recorded: 2019-07-22
Pages: 8
Assignors
FREYTAG, ALEXANDER
Executed: 2019-06-07
HUSEMANN, CHRISTOPH
Executed: 2019-06-07
SEIDEL, DIRK
Executed: 2019-06-07
SCHMIDT, CARSTEN
Executed: 2019-06-25
SCHERUEBL, THOMAS
Executed: 2019-07-09
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Apparatus and Method for Analyzing an Element of a Photolithography Process with the Aid of a Transformation Model