Patent Assignment
Reel/Frame 049815/0554
Assignment of Assignor's Interest
Recorded: 2019-07-22
Pages: 3
Assignor
DANILIN, ALEXANDER ALEXANDROVICH
Executed: 2015-11-16
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method of Predicting Performance of a Lithographic Apparatus, Calibration of Lithographic Apparatus, Device Manufacturing Method