Patent Assignment
Reel/Frame 049894/0696
Assignment of Assignor's Interest
Recorded: 2019-07-30
Pages: 3
Assignors
SAKATA, SHUNYA
Executed: 2019-04-26
TAKAHASHI, AKIHIRO
Executed: 2019-04-26
OSAKA, NOBORU
Executed: 2019-04-26
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Substrate Holding Apparatus, Exposure Apparatus, and Article Manufacturing Method