Patent Assignment
Reel/Frame 049932/0460
Assignment of Assignor's Interest
Recorded: 2019-08-01
Pages: 7
Assignors
KAMIMURA, FUMIHIRO
Executed: 2019-07-22
OTSUKA, TAKAHISA
Executed: 2019-07-22
KOMIYA, HIROSHI
Executed: 2019-07-22
OGATA, NOBUHIRO
Executed: 2019-07-31
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method