Patent Assignment
Reel/Frame 049932/0584
Assignment of Assignor's Interest
Recorded: 2019-08-01
Pages: 2
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Method of Filling Gaps with Carbon and Nitrogen Doped Film