Patent Assignment
Reel/Frame 049943/0783
Assignment of Assignor's Interest
Recorded: 2019-08-02
Pages: 6
Assignors
KIKUCHI, YUKI
Executed: 2019-07-19
WADA, TOSHIHARU
Executed: 2019-07-19
MAEKAWA, KAORU
Executed: 2019-07-19
KO, AKITERU
Executed: 2019-07-19
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Methods to Reshape Spacers for Multi-Patterning Processes Using Thermal Decomposition Materials