Patent Assignment
Reel/Frame 049945/0871
Assignment of Assignor's Interest
Recorded: 2019-08-02
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Tool with Integrated Metrology and Method of Using