Patent Assignment
Reel/Frame 050009/0549
Assignment of Assignor's Interest
Recorded: 2019-08-09
Pages: 6
Assignors
KIKUCHI, YUKI
Executed: 2019-08-06
WADA, TOSHIHARU
Executed: 2019-08-02
MAEKAWA, KAORU
Executed: 2019-08-09
KO, AKITERU
Executed: 2019-08-06
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Methods to Reduce Gouging for Core Removal Processes Using Thermal Decomposition Materials