Patent Assignment
Reel/Frame 050038/0273
Assignment of Assignor's Interest
Recorded: 2019-08-13
Pages: 3
Assignor
SHINAGAWA, JUN
Executed: 2019-08-13
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Sensor-To-Sensor Matching Methods for Chamber Matching