Patent Assignment
Reel/Frame 050042/0788
Assignment of Assignor's Interest
Recorded: 2019-08-13
Pages: 9
Assignors
MAISHIGI, KEIJI
Executed: 2019-01-17
SUGIURA, TETSURO
Executed: 2019-01-17
USUI, KATSUAKI
Executed: 2019-01-17
HATAKEYAMA, MASAHIRO
Executed: 2019-01-17
HONMA, CHIKAKO
Executed: 2019-01-17
OSUGA, TORU
Executed: 2019-01-17
IWASAKI, KOICHI
Executed: 2019-01-17
LIN, JIE YUAN
Executed: 2019-01-17
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 1448510, JAPAN
Covered Property
(1)
Information Processing Apparatus, Information Processing System, Information Processing Method, Program, Substrate Processing Apparatus, Criterion Data Determination Apparatus, and Criterion Data Determination Method