Patent Assignment
Reel/Frame 050061/0396
Assignment of Assignor's Interest
Recorded: 2019-08-15
Pages: 3
Assignors
MENGER, JASPER
Executed: 2014-12-17
ABEN, PAUL CORNELIS HUBERTUS
Executed: 2014-12-17
MOS, EVERHARDUS CORNELIS
Executed: 2014-12-16
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, 5504 DR, NETHERLANDS
Covered Property
(1)
Methods and Apparatus for Calculating Substrate Model Parameters and Controlling Lithographic Processing