Patent Assignment
Reel/Frame 050143/0041
Assignment of Assignor's Interest
Recorded: 2019-08-23
Pages: 3
Assignors
LIU, SHIH-KUO
Executed: 2019-07-05
CHANG, CHIA-HSUN
Executed: 2019-06-17
KOAI, KEITH KUANG-KUO
Executed: 2019-06-17
CHEAH, WAI HONG
Executed: 2019-07-15
HUNG, MING-CHUAN
Executed: 2019-07-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
NO.8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
Apparatus for Cleaning Semiconductor Equipment