Patent Assignment
Reel/Frame 050148/0789
Assignment of Assignor's Interest
Recorded: 2019-08-23
Pages: 5
Assignors
AKASHI, NAO
Executed: 2019-08-19
HAGA, YUTA
Executed: 2019-08-21
SATO, HIROYUKI
Executed: 2019-08-21
OKADA, MOTOI
Executed: 2019-08-19
SANO, KEI
Executed: 2019-08-19
SATO, JUNYA
Executed: 2019-08-19
KITA, TAKAYUKI
Executed: 2019-08-19
SUZUKI, ATSUSHI
Executed: 2019-08-15
TSUKINO, KIWAMU
Executed: 2019-08-19
TSUTSUI, TAKURO
Executed: 2019-08-19
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate State Determining Apparatus, Substrate Processing Apparatus, Model Generating Apparatus, and Substrate State Determining Method