Patent Assignment
Reel/Frame 050169/0153
Assignment of Assignor's Interest
Recorded: 2019-08-26
Pages: 3
Assignors
WANG, RONGPING
Executed: 2019-06-27
SALIMIAN, SIAMAK
Executed: 2019-08-14
CHO, TOM K.
Executed: 2019-06-27
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Method and Apparatus for Actively Tuning a Plasma Power Source