Patent Assignment
Reel/Frame 050218/0644
Assignment of Assignor's Interest
Recorded: 2019-08-30
Pages: 5
Assignors
TAKAHASHI, TOMOHIRO
Executed: 2019-07-16
TAKECHI, KEI
Executed: 2019-07-16
SASAKI, MITSUTOSHI
Executed: 2019-07-16
AKIYAMA, TAKASHI
Executed: 2019-07-16
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI,, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Device and Substrate Processing Method
Application:
16/551,707 →
Publication:
US 2020/0098597