Patent Assignment
Reel/Frame 050226/0301
Assignment of Assignor's Interest
Recorded: 2019-08-30
Pages: 6
Assignors
O'MEARA, DAVID L.
Executed: 2017-05-11
TAPILY, KANDABARA N.
Executed: 2017-05-10
MOHANTY, NIHAR
Executed: 2017-05-27
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Bottom-Up Formation of a Film in a Recessed Feature