Patent Assignment
Reel/Frame 050246/0567
Assignment of Assignor's Interest
Recorded: 2019-09-03
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Atomic Layer Etching Using a Boron-Containing Gas and Hydrogen Fluoride Gas