Patent Assignment
Reel/Frame 050252/0952
Assignment of Assignor's Interest
Recorded: 2019-09-03
Pages: 7
Assignors
PLATZGUMMER, ELMAR
Executed: 2018-10-01
SPENGLER, CHRISTOPH
Executed: 2018-10-01
NAETAR, WOLF
Executed: 2018-10-01
Assignee
IMS NANOFABRICATION GMBH
SCHREYGASSE 3, WIEN, 1020, AUSTRIA
Covered Property
(1)
Dose-Related Feature Reshaping in an Exposure Pattern to be Exposed in a Multi Beam Writing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.