Patent Assignment
Reel/Frame 050274/0515
Assignment of Assignor's Interest
Recorded: 2019-09-05
Pages: 7
Assignors
PARK, SANGJINE
Executed: 2019-08-08
CHO, BYUNG-KWON
Executed: 2019-08-08
JEONG, JIHOON
Executed: 2019-08-08
KIM, YOUNGTAK
Executed: 2019-08-09
KO, YONGSUN
Executed: 2019-08-12
JEON, SEULGEE
Executed: 2019-08-12
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Supercritical Drying Apparatus and Method of Drying Substrate Using the Same