Patent Assignment
Reel/Frame 050293/0663
Assignment of Assignor's Interest
Recorded: 2019-09-06
Pages: 8
Assignors
YUFUNE, SHUTA
Executed: 2019-06-11
HIRATA, TAKUYA
Executed: 2019-05-30
IGARASHI, TAKESHI
Executed: 2019-05-31
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Laser Beam Irradiation Detection Device, Laser Beam Irradiation Detection Method, and Laser Beam Irradiation Detection System
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.