Patent Assignment
Reel/Frame 050298/0571
Assignment of Assignor's Interest
Recorded: 2019-09-06
Pages: 8
Assignors
KURIBAYASHI, KOEI
Executed: 2019-05-27
HANASHIMA, TAKEO
Executed: 2019-05-27
MIYAGISHI, HIROYUKI
Executed: 2019-06-04
YAMAGISHI, HIROTO
Executed: 2019-06-09
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Property
(1)
Method of Cleaning, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium