Patent Assignment
Reel/Frame 050320/0444
Assignment of Assignor's Interest
Recorded: 2019-09-10
Pages: 3
Assignee
CANON KABUSHIKI KAISHA
30-2, SHIMOMARUKO 3-CHOME, OHTA-KU, TOKYO, 146-8501, JAPAN
Covered Property
(1)
Error Detection and Correction in Lithography Processing