Patent Assignment
Reel/Frame 050330/0571
Assignment of Assignor's Interest
Recorded: 2019-09-10
Pages: 3
Assignor
TABATA, MASAHIRO
Executed: 2019-08-10
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Method and Plasma Processing Apparatus