Patent Assignment
Reel/Frame 050347/0313
Assignment of Assignor's Interest
Recorded: 2019-09-11
Pages: 5
Assignors
HSU, PEI-CHENG
Executed: 2019-08-12
LIEN, TA-CHENG
Executed: 2019-08-12
LIN, PING-HSUN
Executed: 2019-08-12
WANG, SHIH-CHE
Executed: 2019-08-12
LEE, HSIN-CHANG
Executed: 2019-08-12
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Protection Layer on Low Thermal Expansion Material (Ltem) Substrate of Extreme Ultraviolet (Euv) Mask