Patent Assignment
Reel/Frame 050351/0600
Assignment of Assignor's Interest
Recorded: 2019-09-12
Pages: 3
Assignor
BLAESING-BANGERT, CAROLA
Executed: 2019-08-28
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property
(1)
Method and Apparatus for Transforming Measurement Data of a Photolithographic Mask for the Euv Range from First Surroundings into Second Surroundings