Patent Assignment
Reel/Frame 050366/0513
Assignment of Assignor's Interest
Recorded: 2019-09-13
Pages: 3
Assignors
LIAN, JIN
Executed: 2018-06-01
ZHOU, ZILI
Executed: 2018-06-01
AKBULUT, DUYGU
Executed: 2018-06-04
TARABRIN, SERGEY
Executed: 2018-06-04
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Measurement Apparatus and Method of Measuring a Target