Patent Assignment
Reel/Frame 050373/0697
Assignment of Assignor's Interest
Recorded: 2019-09-13
Pages: 5
Assignors
HSU, PEI-CHENG
Executed: 2019-07-15
WEN, CHI-PING
Executed: 2019-07-15
WANG, TZU YI
Executed: 2019-07-15
LIEN, TA-CHENG
Executed: 2019-07-15
LEE, HSIN-CHANG
Executed: 2019-07-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Mask for Euv Lithography and Method of Manufacturing the Same