Patent Assignment
Reel/Frame 050387/0069
Assignment of Assignor's Interest
Recorded: 2019-09-16
Pages: 4
Assignors
WANG, SHENG-TSUNG
Executed: 2019-09-03
HUANG, LIN-YU
Executed: 2019-09-03
CHUANG, CHIA-LIN
Executed: 2019-09-03
CHANG, CHIA-HAO
Executed: 2019-09-03
CHUANG, CHENG-CHI
Executed: 2019-09-03
LIN, YU-MING
Executed: 2019-09-03
WANG, CHIH-HAO
Executed: 2019-09-03
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Gate Spacer with Air Gap for Semiconductor Device Structure and Method for Forming the Same