Patent Assignment
Reel/Frame 050449/0939
Assignment of Assignor's Interest
Recorded: 2019-09-20
Pages: 3
Assignors
TSUJI, NORIHIKO
Executed: 2019-09-09
KAWABE, ATSUSHI
Executed: 2019-09-11
OKA, HIROKI
Executed: 2019-09-09
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Device