Patent Assignment
Reel/Frame 050458/0241
Assignment of Assignor's Interest
Recorded: 2019-09-23
Pages: 4
Assignors
KANG, HOYOUNG
Executed: 2019-09-13
DEVILLIERS, ANTON J.
Executed: 2019-09-13
LEMLEY, COREY
Executed: 2019-09-16
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method and System for Prevention of Metal Contamination by Using a Self-Assembled Monolayer Coating