Patent Assignment
Reel/Frame 050459/0727
Assignment of Assignor's Interest
Recorded: 2019-09-23
Pages: 3
Assignors
KIYOHARA, YASUO
Executed: 2019-09-06
INADOMI, HIROAKI
Executed: 2019-09-06
OKAMURA, SATOSHI
Executed: 2019-09-10
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing System and Method for Supplying Processing Fluid