Patent Assignment
Reel/Frame 050469/0344
Assignment of Assignor's Interest
Recorded: 2019-09-24
Pages: 4
Assignor
HIDAKA, YASUHIRO
Executed: 2019-06-05
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Spectrometer Optical System, Semiconductor Inspection Apparatus Including the Same and Method of Manufacturing Semiconductor Device Using the Apparatus