Patent Assignment
Reel/Frame 050485/0353
Assignment of Assignor's Interest
Recorded: 2019-09-25
Pages: 4
Assignors
TAKAHASHI, SHUICHI
Executed: 2019-09-17
MIYADATE, TAKAHARU
Executed: 2019-09-18
KIKUCHI, TAKAAKI
Executed: 2019-09-17
OGATA, ATSUSHI
Executed: 2019-09-18
SASAKI, NOBUTAKA
Executed: 2019-09-18
TAIRA, TAKASHI
Executed: 2019-09-17
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus
Application:
16/582,115 →
Publication:
US 2020/0098550