Patent Assignment
Reel/Frame 050489/0764
Assignment of Assignor's Interest
Recorded: 2019-09-25
Pages: 5
Assignor
TOSHIBA MEMORY CORPORATION
Executed: 2019-09-24
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method