Patent Assignment
Reel/Frame 050490/0362
Assignment of Assignor's Interest
Recorded: 2019-09-25
Pages: 9
Assignors
HARADA, KAZUHIRO
Executed: 2019-09-02
NOHARA, SHINGO
Executed: 2019-09-02
URANO, YUJI
Executed: 2019-09-02
KOSHI, YASUNOBU
Executed: 2019-09-02
MINAMI, MASAYOSHI
Executed: 2019-09-02
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Property
(1)
Method of Cleaning, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium