Patent Assignment
Reel/Frame 050501/0819
Assignment of Assignor's Interest
Recorded: 2019-09-26
Pages: 5
Assignors
MORIKAWA, KATSUHIRO
Executed: 2019-09-17
AKIMOTO, MASAMI
Executed: 2019-09-17
MORITA, SATOSHI
Executed: 2019-09-17
MIZUNAGA, KOUICHI
Executed: 2019-09-17
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus Including Periphery Cover Body