Patent Assignment
Reel/Frame 050566/0467
Assignment of Assignor's Interest
Recorded: 2019-09-30
Pages: 5
Assignors
TAKAHASHI, NOBUHIRO
Executed: 2019-09-13
ASADA, YASUO
Executed: 2019-09-13
MATSUNAGA, JUNICHIRO
Executed: 2019-09-17
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method and Storage Medium