Patent Assignment
Reel/Frame 050601/0391
Assignment of Assignor's Interest
Recorded: 2019-10-02
Pages: 4
Assignee
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
352 HENRY ADMINISTRATION BUILDING, 506 S. WRIGHT, URBANA, ILLINOIS, 61801
Covered Property
(1)
Polarization-Dependent Laser-Assisted Plasma Etching