Patent Assignment
Reel/Frame 050641/0034
Assignment of Assignor's Interest
Recorded: 2019-10-07
Pages: 3
Assignor
ISHIZAWA, SHIGERU
Executed: 2017-07-03
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Focus Ring Replacement Method and Plasma Processing System