Patent Assignment
Reel/Frame 050655/0662
Assignment of Assignor's Interest
Recorded: 2019-10-08
Pages: 8
Assignors
JIA, LINGYUN
Executed: 2018-09-21
PORE, VILJAMI J.
Executed: 2018-09-07
TUOMINEN, MARKO
Executed: 2018-09-14
KIM, SUN JA
Executed: 2018-09-10
MADIA, ORESTE
Executed: 2018-09-14
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, ALMERE, 1322 AP, NETHERLANDS
Covered Property
(1)
Plasma Enhanced Deposition Processes for Controlled Formation of Oxygen Containing Thin Films