Patent Assignment
Reel/Frame 050683/0805
Assignment of Assignor's Interest
Recorded: 2019-10-10
Pages: 4
Assignors
YOSHIDA, YUSUKE
Executed: 2019-10-10
MARION, JASON
Executed: 2019-10-10
VORONIN, SERGEY
Executed: 2019-10-10
RANJAN, ALOK
Executed: 2019-10-09
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Methods for Stability Monitoring and Improvements to Plasma Sources for Plasma Processing