Patent Assignment
Reel/Frame 050686/0163
Assignment of Assignor's Interest
Recorded: 2019-10-11
Pages: 8
Assignors
CHENG, CHUN-WEN
Executed: 2019-08-28
LAI, FEI-LUNG
Executed: 2019-08-28
CHANG, KUEI-SUNG
Executed: 2019-08-28
TSAI, SHANG-YING
Executed: 2019-09-06
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSIN-CHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Mems Device with Dummy-Area Utilization for Pressure Enhancement