Patent Assignment
Reel/Frame 050723/0373
Assignment of Assignor's Interest
Recorded: 2019-10-15
Pages: 8
Assignors
CLARK, ROBERT
Executed: 2019-04-15
TAPILY, KANDABARA
Executed: 2019-04-18
MEHIGAN, JASON
Executed: 2019-04-11
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Platform and Method of Operating for Integrated End-to-End Area-Selective Deposition Process