Patent Assignment
Reel/Frame 050735/0610
Assignment of Assignor's Interest
Recorded: 2019-10-16
Pages: 4
Assignors
LIN, TIEN-LU
Executed: 2019-09-10
WU, CHE-CHEN
Executed: 2019-09-10
CHUANG, CHIA-LIN
Executed: 2019-09-10
LIN, YU-MING
Executed: 2019-09-09
CHANG, CHIH-HAO
Executed: 2019-09-10
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Semiconductor Device with Air Gap on Gate Structure and Method for Forming the Same