Patent Assignment
Reel/Frame 050745/0991
Assignment of Assignor's Interest
Recorded: 2019-10-17
Pages: 5
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
System and Method for Rendering SEM Images and Predicting Defect Imaging Conditions of Substrates Using 3D Design