Patent Assignment
Reel/Frame 050747/0344
Assignment of Assignor's Interest
Recorded: 2019-10-17
Pages: 6
Assignors
ROTONDARO, ANTONIO
Executed: 2019-08-29
BASSETT, DEREK
Executed: 2019-08-29
HURD, TRACE
Executed: 2019-08-30
SIMMS, IHSAN
Executed: 2019-08-29
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Apparatus and Method to Electrostatically Remove Foreign Matter from Substrate Surfaces