Patent Assignment
Reel/Frame 050749/0993
Assignment of Assignor's Interest
Recorded: 2019-10-17
Pages: 6
Assignors
INOUE, NAOYA
Executed: 2019-09-26
OHASHI, MASAKI
Executed: 2019-09-26
MASUNAGA, KEIICHI
Executed: 2019-09-26
KOTAKE, MASAAKI
Executed: 2019-09-26
Assignee
SHIN-ETSU CHEMICAL CO., LTD.
6-1, OHTEMACHI 2-CHOME, CHIYODA-KU, TOKYO, JAPAN
Covered Property
(1)
Onium Salt, Negative Resist Composition, and Resist Pattern Forming Process