Patent Assignment
Reel/Frame 050754/0584
Assignment of Assignor's Interest
Recorded: 2019-10-17
Pages: 3
Assignee
NIKON CORPORATION
SHINAGAWA INTERCITY TOWER C, 2-15-3, KONAN, MINATO-KU, TOKYO, 108-6290, JAPAN
Covered Property
(1)
Optical Objective for Operation in Euv Spectral Region